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Materials Sciences
Cryogenic Systems
Bluefors Ultra-Compact LD Dilution Refrigerator Measurement Systems
The Ultra-Compact LD helium dilution refrigerator system from Bluefors is a high-end integrated cryogenic solution, allowing for temperatures down to milli-Kelvin in a super compact design. The device combines a cryostat, measurement system, and control infrastructure in a synchronized platform, optimized for low-temperature physics research, quantum computing, and experiments requiring extremely high stability in confined spaces.
Cryogenic Systems
Bluefors LH Dilution Refrigerator Measurement Systems
Bluefors LH is a horizontal dilution refrigerator system, providing a stable milli-Kelvin temperature environment for cryogenic measurement applications and quantum research. The design supports operation at various angles, suitable for cryogenic detectors, beamlines, quantum optics, and ultra-low temperature experiments requiring high stability.
Cryogenic Systems
Bluefors XLDHe 1K High Power Measurement System
Bluefors XLDHehp is a high cooling power 1K cryogenic system, providing a stable low temperature environment for quantum applications and high-performance cryogenic measurements. The system supports large heat loads, high-density wiring, and low noise RF/DC measurements, suitable for spin qubits, cryogenic detectors, and ultra-low temperature research.
Cryogenic Systems
Bluefors XLDHesl 1K Measurement Systems
Bluefors XLDHesl is an integrated 1K side-loading cryogenic system that provides a stable low-temperature environment for quantum applications and high-performance cryogenic research. The side-loading design supports high-density wiring, flexible expansion, and quick replacement of measurement infrastructure for complex quantum experiments.
Cryogenic Systems
Bluefors LDHe 1K Measurement System
The 1K cryogenic measurement system using helium is designed for ultra-low temperature experiments in superconducting material research, quantum physics, and quantum devices. An optimal solution for modern R&D laboratories.
Cryogenic Systems
Bluefors SDHe 1K Measurement System
The 1K cryogenic measurement system using helium (SDHe), compact design for low temperature experiments in superconducting material research, quantum physics, and quantum technology. A flexible solution for modern R&D laboratories.
Cryogenic Systems
Bluefors Cryogenic Wafer Prober
Cryogenic wafer testing system for quantum chips, allowing characterization of quantum devices and superconducting circuits at ultra-low temperatures, supporting research and development of quantum computing technology in a wafer-level environment.
Maskless Laser Lithography (MLA)
MLA 300 Maskless Aligner - Heidelberg Instruments
The MLA 300 is optimized for high volume production. The Spatial Light Modulator (SLM) technology allows for distortion correction for each die, automatically focusing on curved surfaces, compatible with SECS/GEM. Completely eliminates the costs and hassles of physical masks. Applications in MEMS production, sensors, ASIC, advanced packaging, power electronics.

Maskless Laser Lithography (MLA)
ULTRA Maskless Aligner - Heidelberg Instruments
ULTRA is a lithography machine using two high-speed SLMs. Layer accuracy of 30 nm, CD uniformity of 30 mm, minimum size of 500 nm. DPSS 355 nm laser reduces operating costs by 80%. Producing masks for semiconductors, easily integrated into the mask production workshop.

Physical Vapor Deposition (PVD)
UHV Thin Film Deposition System LAB Line

The Lab Line system represents a technological breakthrough in the fabrication of thin films in the semiconductor research sector and advanced optoelectronic components. The core mechanism of the system is based on establishing and maintaining a stringent ultra-high vacuum (UHV) environment before and throughout the magnetron sputtering process.

Maskless Laser Lithography (MLA)
VPG 300 DI Maskless Stepper - Heidelberg Instruments
The VPG 300 DI is a direct write lithography machine that inherits technology from the VPG (Volume Pattern Generator) line used in mask production. The VPG 300 DI is equipped with a Zerodur table, a differential interferometer, and a DPSS laser at 355 nm. Resolution down to 500 nm, layer 2 alignment (global) achieves 100 nm. Ideal for industrial R&D, small batch production, mix-and-match with a stepper.

Advanced Packaging & Testing
Thin Wire Wedge-Wedge Bonder F&S Bondtec 5330

F&S Bondtec 5330 is a Wedge-Wedge wire bonding machine specialized for gold wire, aluminum wire 17.5–75 µm, and ribbon up to 250 µm. Integrated with a Z-axis driven by a linear stepper motor for automatic wire feeding and cutting, ensuring high repeatability of the bond suitable for R&D, prototyping, small-scale production, and microchip repair.

 

Advanced Packaging & Testing
Automatic Large Area Bonder Heavy-Wire F&S Bondtec 8650

The F&S Bondtec 8650 automatic wire bonding machine features flexible Wedge-Wedge bonding technology for large wires combined with an intelligent image recognition system (PRU). The machine achieves an X/Y travel of up to 700x480 mm with a large force range from 0-1800 cN and integrates CO2 snow cleaning. The device optimizes packaging speed, eliminates manual errors, and is ideal for R&D and the production of hybrid circuits, with average COB output.

Secondary Ion Mass Spectrometry (SIMS)
Secondary Ion Mass Spectrometry (SIMS) AKONIS

With advanced EXLIE ion beam technology, the SIMS AKONIS secondary mass spectrometer achieves a resolution of <1 nm/decade. This is the optimal in-line solution for high-volume semiconductor manufacturing (HVM), enabling measurement of film composition and ion implantation profiles on 20 µm ultra-small pads fully automated without the need for SIMS experts.

Advanced Packaging & Testing
Weld Bonding F&S Bondtec 90 series

The F&S Bondtec Series 90 is groundbreaking with the philosophy of "6 in 1", allowing for quick swapping between automatic wire soldering heads and pull/shear testing on the same platform. The machine features an ultra-wide working area of 480x700mm along with an intelligent PRS image recognition system, optimizing accuracy and processing speed. This solution helps businesses maximize equipment investment costs and flexibly change production models continuously without worrying about memory limitations. Series 90 is the ideal choice for applications in microchip packaging, power semiconductor components, and connecting electric vehicle battery cells.

Advanced Packaging & Testing
Heavy Wire Wedge Bonder F&S Bondtec 5350

F&S Bondtec 5350 is a Wedge-Wedge wire bonding machine for large wires 100–500 µm (Al) and 100–300 µm (Cu), supporting ribbons up to 250 µm. The machine uses a motorized Z/Y axis, Voice-Coil bonding force 0–1800 cN, automatic micrometer wire cutting, ultrasonic 58 kHz (optional 40–120 kHz), suitable for R&D, prototyping, and repair with high repeatability.

Advanced Packaging & Testing
Universal Automatic Bonder & Tester F&S Bondtec 5600Ci

The 5600Ci wire bonder and pull/shear tester features a proprietary All-in-One design, allowing for flexible switching between automatic pull and shear test heads. The system achieves an accuracy of up to 0.1% and a rapid testing speed of 2 to 3 seconds per wire, driven by an intelligent machine vision system. The equipment optimizes investment costs, supports SPC-compliant data storage, and serves as an ideal solution for COB and hybrid microcircuit applications within the semiconductor industry.

Advanced Packaging & Testing
Ball-Wedge Bonder F&S Bondtec 5310

The F&S Bondtec 5310 is a manual wire bonder specialized for processing gold (Au) wires with diameters ranging from 17.5 to 50 µm on 2-inch spools. The system achieves a fine-step resolution of 1 µm, integrates a thermal controller heating up to 250°C, and stores bonding parameters directly to the hard drive. Delivering highly uniform and reproducible bonding results, this equipment is ideal for prototyping, R&D, and microcircuit repair.

Advanced Packaging & Testing
Ball-Wedge Bonder F&S Bondtec 5610i

The F&S BONDTEC 5610i is a groundbreaking semi-automatic Gold Ball wire bonder fully controlled via PC, bridging the gap between manual and automatic equipment. The system delivers an ultra-high placement accuracy of ±5 µm @ 3 Sigma, an impressive speed of 2 to 3 seconds per wire, and the flexibility to swap bond heads within just 3 minutes. Featuring two versatile operating modes (Single Bond and Multi Wire), the equipment offers outstanding optimization for advanced microcircuit bonding and die repair tasks, while seamlessly converting into a pull/shear tester.

Advanced Packaging & Testing
Automatic Large Area Bond Tester F&S Bondtec 8600C
The F&S BONDTEC 8600C is a next-generation, PC-controlled automatic bond tester capable of performing fully automated pull and shear tests over a large area. The system supports versatile test heads, including 100 cN, 1,000 cN, and 5,000 cN Pullheads, as well as 500 cN and 5,000 cN Shearheads, catering to a wide range of force spans and bond quality inspection applications within the semiconductor, battery, and solar energy industries.
High-Resolution Ultra-Trace Analysis
X-ray Photoelectron Spectrocopy (XPS) SPECS EnviroMETROS

SPECS EnviroMETROS is the next generation of XPS surface measurement systems (Surface Hybrid Metrology) that is revolutionary, designed specifically for analyzing the chemical composition in depth of thin films from laboratory scale to semiconductor manufacturing. The system integrates core technology of angle-resolved X-ray photoelectron spectroscopy (ARXPS) that is fully automated, combining flexible multi-source X-ray energy and the ability to operate in a very wide pressure range from ultra-high vacuum (UHV) to near-atmospheric pressure (NAP). This is the optimal solution for analyzing layer structure and material properties without destroying the sample.

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