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Materials Sciences
Synthesis & Fabrication
Ion Beam Etching/Sputtering System Elionix 200ERP

EIS-200ERP (Elionix Ion Beam Etching/Sputtering System): This is an ion beam etching/sputtering system capable of nano-level material etching and deposition utilizing an ECR (Electron Cyclotron Resonance) ion beam.

 

Chemical Vapor Deposition (CVD)
Plasma Enhanced Chemical Vapour Deposition Model PlasmaPro 80/100/800

The PlasmaPro series from Oxford Instruments provides flexible plasma processing platforms from R&D to high-volume production, including RIE, ICP, ICP CVD, PECVD, and combined RIE/PE technologies. It supports wafers from small pieces to 300mm, controls film stress with dual frequency (LF/HF), and detects endpoint using OES/laser. An optimal solution for MEMS, sensors, optics, LEDs, power microelectronics, and failure analysis.

Synthesis & Fabrication
Electron Beam Lithography System ELS-ORCA
Designing a square lattice with full connectivity, supporting surface-code error correction. Supporting complex quantum algorithms such as QAOA (Quantum Approximate Optimization Algorithm)..
Synthesis & Fabrication
ELS-BODEN Electron beam lithography system

The ELS-BODEN Series is optimized for ultra-fine patterning applications. The device features a writing area of up to 300 mm², flexible from small size samples, 9-inch masks to 300 mm wafers. The operation process is seamlessly automated thanks to the automatic sample loading system. The device provides a flexible range of optional acceleration voltages: 50, 100, 125, and 150 kV.


Accelerator Mass Spectrometry (AMS)
Mini Carbon Dating System ¹⁴C (MICADAS)

MICADAS is the leading AMS ¹⁴C system from Ionplus AG, providing superior accuracy, energy efficiency, and a compact design for advanced radiocarbon dating applications.

Accelerator Mass Spectrometry (AMS)
Multi-Isotope Low-Energy AMS light (MILEA Light)

Discover MILEA light, the compact multi-isotope Accelerator Mass Spectrometry (AMS) solution from Ionplus AG. Optimized for high-performance measurements of ¹⁰Be, ¹⁴C và ²⁶Al, it is the ideal choice for advanced applications in geosciences and radiocarbon research.

Accelerator Mass Spectrometry (AMS)
Multi-Isotope Low-Energy AMS (MILEA)

The new generation multi-isotope accelerator mass spectrometry (AMS) system from Ionplus AG features a world-leading compact design (only 3.5m x 7m), the ability to accurately analyze multiple isotopes (such as ¹⁰Be, ¹⁴C, ²⁶Al...), and user-friendly operation. MILEA delivers outstanding performance without the need for SF₆ gas, optimized for advanced scientific research.

Advanced Packaging & Testing
Ball-Wedge Bonder F&S Bondtec 5810

The automatic Ball-Wedge wire bonding machine 5810 F&S Bondtec features a flexible interchangeable bonding head along with an intelligent image recognition system. The device provides a repeatability accuracy of ±3 µm, operates fully automatically without operator dependence to optimize productivity. The product is an ideal solution for R&D applications, pilot manufacturing, and medium-scale production.

Advanced Packaging & Testing
Manual Pulltester F&S Bondtec LT-101

The LAB-Tester LT-101 is a compact, streamlined tensile testing machine for welds. The device is equipped with advanced updated software to perform tensile testing easily and quickly. The machine is designed to be versatile, well-suited for both fine wire and large wire applications in the semiconductor packaging industry.

Electron Microscopy (SEM & TEM)
Field Emission Scanning Electron Microscopy FESEM | SEM5000Pro
The CIQTEK SEM5000Pro uses advanced Super-Tunnel electronic optical technology to create a beam path without intersection points and employs a combination of electrostatic and electromagnetic lens design. These improvements help reduce space charge effects, minimize lens aberration, and achieve a resolution of 1.2 nm at 1 kV, providing a solution for direct observation of non-conductive or semiconductor samples.
Electron Microscopy (SEM & TEM)
Tabletop Scanning Electron Microscope - NANOS

NANOS is designed to be compact and modern, providing high-resolution imaging capabilities (< 8nm) and rapid high-quality elemental analysis with a magnification of 200,000x. NANOS becomes the ideal solution for research, industrial, and environmental applications.

Physical Vapor Deposition (PVD)
Thin Film Deposition System NANO 36
NANO 36 is a highly optimized basic thin film deposition device from Kurt J. Lesker. This device is designed to provide a cost-effective solution while ensuring superior component quality, high performance, and a compact installation area.
3D Atom Probe (APT)
3D Atom Probe Tomography APT EIKOS

Possessing atomic probe tomography (APT) technology, EIKOS-UV atomic probe microscope brings the ability to detect single atoms with near-atomic spatial resolution. The device provides a quantitative 3D compositional map, being the optimal cost-effective solution for metallurgical research, additive manufacturing (3D printing), and thin films with superior performance.

Atomic Force Microscopy (AFM)
Atomic Force Microscopy Jupiter XR

Jupiter XR is a large sample AFM that integrates both high-speed scanning and an extended scan range in a single probe (XR scanner). The proprietary blueDrive™ Tapping Mode technology simplifies operation, increases repeatability, and extends probe lifespan. The laser and detector system is fully controlled by software. An ideal solution for industrial measurement, material R&D, semiconductors, polymers and diverse research.

High-Resolution Ultra-Trace Analysis
X-ray Photoelectron Spectrometry (XPS) SPECS ProvenX

Danh mục sản phẩm của SPECS đã được mở rộng với dòng hệ thống quang phổ XPS ProvenX, đại diện cho đỉnh cao từ nền tảng kiến thức rộng lớn của chúng tôi trong việc phát triển và sản xuất các hệ thống phân tích toàn diện nhằm đáp ứng những yêu cầu khoa học khắt khe nhất. ProvenX bao gồm một loạt các hệ thống XPS chuyên dụng cho ARPES, µ-ARPES, Kính hiển vi động lượng (Momentum Microscopy), XPS/UPS cũng như NAP-XPS.

X-ray Diffraction (XRD)
Horizontal electron diffractometer ELDICO ED-1

As the world's first dedicated horizontal electron diffraction machine, the ELDICO ED-1 combines a 160 keV beam source and a DECTRIS QUADRO detector. The device achieves a resolution of <0.84 Å, enabling rapid decoding of nano crystal structures (10–1000 nm). This is the optimal cost-effective solution for pharmaceutical research, battery materials, and agricultural chemicals.

Physical Vapor Deposition (PVD)
Thin Film Deposition System AXXIS
AXXIS is a versatile PVD thin film deposition system designed for research and development (R&D) activities that require various coating techniques on the same equipment. The system allows for the combination of Magnetron sputtering, thermal evaporation, and electron beam evaporation while supporting co-deposition to create multi-component films or complex alloys.
Inductively Coupled Plasma Time-of-Flight Mass Spectrometry (ICPMS-TOF)
Time-of-Flight ICP-MS Vitesse

Vitesse is an Inductively Coupled Plasma Time-of-Flight Mass Spectrometry (ICP-TOF-MS) system, specifically designed for high-speed multi-element applications such as laser ablation imaging and nanoparticle analysis. It features a segmented reaction cell and powerful interference removal capabilities, making it an ideal solution for geochemical, biological, environmental, and materials research.

Physical Vapor Deposition (PVD)
Thin Film Deposition System PRO Line PVD 200

The PRO Line PVD 200 system elevates research productivity with its capability to process large wafers up to 8 inches. The system serves as a perfect solution to shorten your experimental turnaround time, delivering absolutely uniform thin-film deposition for future industrial applications.

High-Resolution Ultra-Trace Analysis
X-ray Photoelectron Spectrocopy (XPS) SPECS EnviroESCA

SPECS' EnviroESCA is an electron spectroscopy system for chemical analysis in real-world environmental conditions thanks to breakthrough (N)AP-XPS technology. The device operates at pressures of up to hundreds of mbar, integrating a micro-focused AlKalpha monochromatic X-ray source and Environmental Charge Compensation to automatically neutralize background charging. EnviroESCA minimizes the time from loading to measuring samples, ideal for research on biological materials, polymers, batteries, catalysts, and liquids.

3D X-ray Microscopy (XRM)
XRF Microscope AttoMap-200
MicroXRF laboratory achieves the highest resolution with a micron-sized unit (3-5 µm) using high-resolution optics. Sensitivity below ppm for quantification down to parts per million (ppm). Along with Sigray's flexible software packages for energy tuning, maximizing throughput and sensitivity with up to 5 different angled X-ray spectra.  
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