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Chemical Vapor Deposition (CVD)
Plasma Enhanced Chemical Vapour Deposition Model PlasmaPro 80/100/800

The PlasmaPro series from Oxford Instruments provides flexible plasma processing platforms from R&D to high-volume production, including RIE, ICP, ICP CVD, PECVD, and combined RIE/PE technologies. It supports wafers from small pieces to 300mm, controls film stress with dual frequency (LF/HF), and detects endpoint using OES/laser. An optimal solution for MEMS, sensors, optics, LEDs, power microelectronics, and failure analysis.

Synthesis & Fabrication
Electron Beam Lithography System ELS-ORCA
ELS-ORCA the application of advanced 30kV EBL Column technology with an upgrade option to 50kV exclusive. The system features an outstanding writing speed of 100 MHz and a Minimum Line Width resolution of up to 10 nm. This is the ideal solution for nano fabrication applications and advanced semiconductor material research and development (R&D).
Synthesis & Fabrication
ELS-BODEN Electron beam lithography system

The ELS-BODEN Series is optimized for ultra-fine patterning applications. The device features a writing area of up to 300 mm², flexible from small size samples, 9-inch masks to 300 mm wafers. The operation process is seamlessly automated thanks to the automatic sample loading system. The device provides a flexible range of optional acceleration voltages: 50, 100, 125, and 150 kV.


Advanced Packaging & Testing
Ball-Wedge Bonder F&S Bondtec 5810

The automatic Ball-Wedge wire bonding machine 5810 F&S Bondtec features a flexible interchangeable bonding head along with an intelligent image recognition system. The device provides a repeatability accuracy of ±3 µm, operates fully automatically without operator dependence to optimize productivity. The product is an ideal solution for R&D applications, pilot manufacturing, and medium-scale production.

Advanced Packaging & Testing
Manual Pulltester F&S Bondtec LT-101

The LAB-Tester LT-101 is a compact, streamlined tensile testing machine for welds. The device is equipped with advanced updated software to perform tensile testing easily and quickly. The machine is designed to be versatile, well-suited for both fine wire and large wire applications in the semiconductor packaging industry.

Electron Microscopy (SEM & TEM)
Field Emission Scanning Electron Microscopy FESEM | SEM5000Pro
The CIQTEK SEM5000Pro uses advanced Super-Tunnel electronic optical technology to create a beam path without intersection points and employs a combination of electrostatic and electromagnetic lens design. These improvements help reduce space charge effects, minimize lens aberration, and achieve a resolution of 1.2 nm at 1 kV, providing a solution for direct observation of non-conductive or semiconductor samples.
Electron Microscopy (SEM & TEM)
Tabletop Scanning Electron Microscope - NANOS

NANOS is designed to be compact and modern, providing high-resolution imaging capabilities (< 8nm) and rapid high-quality elemental analysis with a magnification of 200,000x. NANOS becomes the ideal solution for research, industrial, and environmental applications.

Secondary Ion Mass Spectrometry (SIMS)
IMS 7f‑Auto Secondary Ion Mass Spectrometer

Equipped with double focusing magnetic sector SIMS technology, the IMS 7f-Auto secondary ion mass spectrometer provides excellent depth resolution with a detection limit of ppb. This is a fully automated analytical solution that delivers high throughput for the semiconductor, optoelectronics, and materials industries, maximizing productivity with continuous operation 24/7.

X-ray Absorption Spectroscopy (XAS)
X-ray Absorption Spectroscopy (XAS) QuantumLeap-H2000

QuantumLeap is an advanced X-ray Absorption Spectroscopy (XAS) system featuring dual transmission and fluorescence modes. The system offers a wide energy range from 4.5 to 25 keV and stands as the only laboratory-scale XAS that delivers synchrotron-equivalent performance directly to your lab, providing solutions for batteries and solar cells, catalysis, and heavy element research.

Maskless and Direct-Write Lithography
Tabletop Maskless Aligner µMLA - Heidelberg Instruments
µMLA is a maskless lithography machine in a benchtop format, highly flexible and customizable. It offers two recording modes: Raster Scan (high speed, excellent image quality) and Vector Scan (optimized for curves, low edge roughness). Variable resolution, supporting up to 3 wavelengths (LED/laser). A compact solution for MEMS research, microfluidics, and micro-optics.
Maskless and Direct-Write Lithography
DWL 2000 GS / DWL 4000 - Laser Lithography System
DWL 2000 GS / 4000 GS meets industrial standards, supports CAD output with 1023 gray levels. The proprietary Grayscale technology from Heidelberg Instruments allows for the creation of 2.5D structures and micro lenses with a surface roughness down to 5nm. An optimal solution for hologram fabrication, light diffusion modules, and Fresnel lenses in optical research and micro-optics.
Cryogenic Systems
Bluefors LD Dilution Refrigerator Systems

The Bluefors LD series dilution refrigerator system provides a stable milli-Kelvin cryogenic environment for quantum computing research, supporting superconducting qubits and quantum measurements with high accuracy.  The system uses a helium-3/helium-4 mixture to achieve and maintain continuous milli-Kelvin temperatures through a dilution mechanism in the mixing chamber.

Electron Microscopy (SEM & TEM)
Scanning electron microscope - Focused Ion Beam DB550
FIB-SEM|DB550 integrated with electron optical technology SuperTunnel breakthrough with Gallium ion beam (Ga⁺ liquid metal ion source), providing a resolution of 3nm and sharp images. The device helps optimize the analysis and sample preparation process TEM specimen preparation, perfectly applicable for the semiconductor (semiconductor) field and materials science.
Probe Stations & Testing
Nanoindentation Tester ENT-5

The nano hardness measurement system provides high data reproducibility by minimizing environmental noise effects during measurement. Test load: 0.5 µN ~ 2 N. Simple operation and high data reproducibility. 


Fundamental Research Equipment
Glove Box PureMod
The PureMod Series glove box system belongs to the high-end Modular Range of Jacomex, integrating a high-performance independent clean air recirculation unit Core-10. The device provides excellent performance for any experimental or industrial development process that requires high flexibility in modularity and an atmosphere with ultra-clean purity (< 1 ppm H₂O and O₂).
Fundamental Research Equipment
Glove Box PureSmart
The PureSmart Series glove box system belongs to the standard range of Jacomex, integrating an independent clean air circulation system, designed to optimally meet standardization needs in academic research, start-up laboratories, and high-tech industries.
Fundamental Research Equipment
Glove Box PureEvo
The PureEvo Series glove box system is a high-end, fully customizable configuration (Premium and Fully Customizable) from Jacomex, integrating a high-performance independent Core-12 clean air unit. The device is designed and optimized without limits to perfectly adapt to any complex or specific processes in advanced scientific research and high-tech industry.
Fundamental Research Equipment
Glove Box Jacomex G(Box)
The G(BOX) Series glove box system is part of the modular equipment segment for pressure and humidity control (Modular Glove Box under Regulated Atmosphere) from Jacomex, designed specifically for scientific and industrial applications. The device features a flexible structure, easy to configure and upgrade, providing optimal product protection solutions in environments with controlled humidity or reduced oxygen atmosphere to prevent explosions.
Fundamental Research Equipment
Glovebox Jacomex G(Safe)
The G(Safe) Series glove box system belongs to the high safety protective equipment segment operating in a negative pressure filtered air environment (High Security Glove Box under Negative Pressure Filtered Air) from Jacomex, designed specifically for applications in nuclear research, radiation, and critical industry. The equipment provides a solution for isolation, comprehensively protecting the operator and the environment from harmful agents, radiation, or high biological contamination risks.
Quantum Computers
IQM Spark 5-Qubit Superconducting Quantum Computer for Education and Research
IQM Spark is a 5-qubit superconducting quantum computer developed by IQM Quantum Computers, designed for training and research. The system supports on-premise deployment, fully integrating hardware and software, helping universities and research institutes access, develop, and test practical quantum algorithms.
Electron Microscopy (SEM & TEM)
High Speed Scanning Electron Microscope HEM6000

CIQTEK HEM6000 integrates technologies such as a high-brightness electron gun with a large beam current, a high-speed electron beam deflection system, and a high voltage sample deceleration mechanism. The device accelerates the speed of large-scale nano structure imaging up to 5 times faster than conventional FESEM, providing a perfect large-scale 3D reconstruction solution for the semiconductor and biological industries (biological 3D reconstruction).

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