Main features
- High-speed scanning control unit: Scanning time of 10 ns/pixel, maximum image acquisition speed of 2*100M pixels/s
- High-speed beam deflection system completely electrostatic
- Ability to create large field of view high-resolution images, achieving a maximum field of view of 64 µm * 64 µm with a resolution of 4 nm/pixel
- Reducing electron contact voltage to the sample, increasing the efficiency of electron signal acquisition.
- The magnetic field of the lens covering the sample contributes to creating high-resolution images
Detailed description
Technology & Principles
CIQTEK HEM6000 operates based on a high-brightness Schottky emission field electron gun source combined with a 5-layer high-speed electrostatic beam deflection system. The core principle uses a mixed electrostatic lens to immerse the sample, closely combined with dynamic optical axis shifting technology according to the scanning range and sample table deceleration technology. This architecture helps maintain high current density, eliminates optical aberration, and allows the electron beam to scan extremely quickly across the sample surface with a delay time of only 10 ns per pixel.
High-resolution imaging over a large surface area:
The HEM6000 thoroughly addresses the time issue, which often takes several hours (usually >140 minutes for an area of 2mm2, samples are prone to denaturation or burning due to this continuous beam bombardment) thanks to ultra-fast imaging speed that allows for scanning and analyzing the sample area in just 25 minutes and 32 seconds (five times faster).
The optimal low voltage mode from deceleration technology helps protect the integrity of thin biological tissue structures, while the highly repeatable sample alignment algorithm perfectly processes the metal layers (device/metal layers) of the IC chip without worrying about image shift errors.
Integration, expansion
Equipped with an automatic sample recognition system, automatically selects the imaging area, automatically adjusts brightness and contrast, automatically focuses, and automatically calibrates focal length.