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ARAS
Chemical Vapor Deposition (CVD)
Plasma Enhanced Chemical Vapour Deposition Model PlasmaPro 80/100/800

The PlasmaPro series from Oxford Instruments provides flexible plasma processing platforms from R&D to high-volume production, including RIE, ICP, ICP CVD, PECVD, and combined RIE/PE technologies. It supports wafers from small pieces to 300mm, controls film stress with dual frequency (LF/HF), and detects endpoint using OES/laser. An optimal solution for MEMS, sensors, optics, LEDs, power microelectronics, and failure analysis.

Synthesis & Fabrication
Electron Beam Lithography System ELS-ORCA
ELS-ORCA the application of advanced 30kV EBL Column technology with an upgrade option to 50kV exclusive. The system features an outstanding writing speed of 100 MHz and a Minimum Line Width resolution of up to 10 nm. This is the ideal solution for nano fabrication applications and advanced semiconductor material research and development (R&D).
Synthesis & Fabrication
ELS-BODEN Electron beam lithography system

The ELS-BODEN Series is optimized for ultra-fine patterning applications. The device features a writing area of up to 300 mm², flexible from small size samples, 9-inch masks to 300 mm wafers. The operation process is seamlessly automated thanks to the automatic sample loading system. The device provides a flexible range of optional acceleration voltages: 50, 100, 125, and 150 kV.


Accelerator Mass Spectrometry (AMS)
Multi-Isotope Low-Energy AMS (MILEA)

The new generation multi-isotope accelerator mass spectrometry (AMS) system from Ionplus AG features a world-leading compact design (only 3.5m x 7m), the ability to accurately analyze multiple isotopes (such as ¹⁰Be, ¹⁴C, ²⁶Al...), and user-friendly operation. MILEA delivers outstanding performance without the need for SF₆ gas, optimized for advanced scientific research.

Advanced Packaging & Testing
Ball-Wedge Bonder F&S Bondtec 5810

The automatic Ball-Wedge wire bonding machine 5810 F&S Bondtec features a flexible interchangeable bonding head along with an intelligent image recognition system. The device provides a repeatability accuracy of ±3 µm, operates fully automatically without operator dependence to optimize productivity. The product is an ideal solution for R&D applications, pilot manufacturing, and medium-scale production.

Advanced Packaging & Testing
Manual Pulltester F&S Bondtec LT-101

The LAB-Tester LT-101 is a compact, streamlined tensile testing machine for welds. The device is equipped with advanced updated software to perform tensile testing easily and quickly. The machine is designed to be versatile, well-suited for both fine wire and large wire applications in the semiconductor packaging industry.

Electron Microscopy (SEM & TEM)
Field Emission Scanning Electron Microscopy FESEM | SEM5000Pro
The CIQTEK SEM5000Pro uses advanced Super-Tunnel electronic optical technology to create a beam path without intersection points and employs a combination of electrostatic and electromagnetic lens design. These improvements help reduce space charge effects, minimize lens aberration, and achieve a resolution of 1.2 nm at 1 kV, providing a solution for direct observation of non-conductive or semiconductor samples.
Confocal Microscopy
Andor BC43 Benchtop Microscope

Andor BC43 is a line of benchtop microscopes integrated with three modes of imaging: widefield, high-speed confocal, and super resolution that can be upgraded on site. Using spinning disk technology, the BC43 provides clear images, 10 times faster than point-scanning confocal, with super resolution reaching 140-180 nm. An ideal solution for cell biology, developmental biology, neuroscience, cancer, and tissue.

Electron Microscopy (SEM & TEM)
Tabletop Scanning Electron Microscope - NANOS

NANOS is designed to be compact and modern, providing high-resolution imaging capabilities (< 8nm) and rapid high-quality elemental analysis with a magnification of 200,000x. NANOS becomes the ideal solution for research, industrial, and environmental applications.

3D Atom Probe (APT)
3D Atom Probe Tomography APT EIKOS

Possessing atom probe tomography (APT) technology, EIKOS-UV atom probe microscope brings the ability to detect single atoms with near-atomic spatial resolution. The device provides a quantitative 3D compositional map, being the optimal cost-effective solution for metallurgical research, additive manufacturing (3D printing), and thin films with superior performance.

X-ray Diffraction (XRD)
Horizontal electron diffractometer ELDICO ED-1

As the world's first dedicated horizontal electron diffraction machine, the ELDICO ED-1 combines a 160 keV beam source and a DECTRIS QUADRO detector. The device achieves a resolution of <0.84 Å, enabling rapid decoding of nano crystal structures (10–1000 nm). This is the optimal cost-effective solution for pharmaceutical research, battery materials, and agricultural chemicals.

HR Ultra-Trace Analysis
X-ray Photoelectron Spectrocopy (XPS) SPECS EnviroESCA

SPECS' EnviroESCA is an electron spectroscopy system for chemical analysis in real-world environmental conditions thanks to breakthrough (N)AP-XPS technology. The device operates at pressures of up to hundreds of mbar, integrating a micro-focused AlKalpha monochromatic X-ray source and Environmental Charge Compensation to automatically neutralize background charging. EnviroESCA minimizes the time from loading to measuring samples, ideal for research on biological materials, polymers, batteries, catalysts, and liquids.

X-ray Absorption Spectroscopy (XAS)
X-ray Absorption Spectroscopy (XAS) QuantumLeap-H2000

QuantumLeap is an advanced X-ray Absorption Spectroscopy (XAS) system featuring dual transmission and fluorescence modes. The system offers a wide energy range from 4.5 to 25 keV and stands as the only laboratory-scale XAS that delivers synchrotron-equivalent performance directly to your lab, providing solutions for batteries and solar cells, catalysis, and heavy element research.

Secondary Ion Mass Spectrometry (SIMS)
NanoSIMS 50L
It is an advanced secondary ion mass spectrometer (SIMS), NanoSIMS 50L featuring a proprietary co-axial optical design. The device analyzes isotopes and trace elements at a resolution of <50 nm, ppm sensitivity with parallel acquisition speed. This is a superior analytical solution dedicated to research in geology, cell biology and materials science.
Maskless and Direct-Write Lithography
Tabletop Maskless Aligner µMLA - Heidelberg Instruments
µMLA is a maskless lithography machine in a benchtop format, highly flexible and customizable. It offers two recording modes: Raster Scan (high speed, excellent image quality) and Vector Scan (optimized for curves, low edge roughness). Variable resolution, supporting up to 3 wavelengths (LED/laser). A compact solution for MEMS research, microfluidics, and micro-optics.
Maskless and Direct-Write Lithography
DWL 2000 GS / DWL 4000 - Laser Lithography System
DWL 2000 GS / 4000 GS meets industrial standards, supports CAD output with 1023 gray levels. The proprietary Grayscale technology from Heidelberg Instruments allows for the creation of 2.5D structures and micro lenses with a surface roughness down to 5nm. An optimal solution for hologram fabrication, light diffusion modules, and Fresnel lenses in optical research and micro-optics.
Cryogenic Systems
Bluefors LD Dilution Refrigerator Systems

The Bluefors LD series dilution refrigerator system provides a stable milli-Kelvin cryogenic environment for quantum computing research, supporting superconducting qubits and quantum measurements with high accuracy.  The system uses a helium-3/helium-4 mixture to achieve and maintain continuous milli-Kelvin temperatures through a dilution mechanism in the mixing chamber.

Electron Microscopy (SEM & TEM)
Scanning electron microscope - Focused Ion Beam DB550
FIB-SEM|DB550 integrated with electron optical technology SuperTunnel breakthrough with Gallium ion beam (Ga⁺ liquid metal ion source), providing a resolution of 3nm and sharp images. The device helps optimize the analysis and sample preparation process TEM specimen preparation, perfectly applicable for the semiconductor (semiconductor) field and materials science.
Probe Stations & Testing
Nanoindentation Tester ENT-5

The nano hardness measurement system provides high data reproducibility by minimizing environmental noise effects during measurement. Test load: 0.5 µN ~ 2 N. Simple operation and high data reproducibility. 


Fundamental Research Equipment
Glove Box PureMod
The PureMod Series glove box system belongs to the high-end Modular Range of Jacomex, integrating a high-performance independent clean air recirculation unit Core-10. The device provides excellent performance for any experimental or industrial development process that requires high flexibility in modularity and an atmosphere with ultra-clean purity (< 1 ppm H₂O and O₂).
Fundamental Research Equipment
Glove Box PureSmart
The PureSmart Series glove box system belongs to the standard range of Jacomex, integrating an independent clean air circulation system, designed to optimally meet standardization needs in academic research, start-up laboratories, and high-tech industries.
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