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Bluefors Cryogenic Wafer Prober

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Bluefors SDHe 1K Measurement System
Bluefors SDHe 1K Measurement System
MLA 300 Maskless Aligner - Heidelberg Instruments
MLA 300 Maskless Aligner - Heidelberg Instruments

Bluefors Cryogenic Wafer Prober

Cryogenic wafer testing system for quantum chips, allowing characterization of quantum devices and superconducting circuits at ultra-low temperatures, supporting research and development of quantum computing technology in a wafer-level environment.
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  • Field of Study
  • Brand - Bluefors
Bluefors
Bluefors

The number 1 brand for helium dilution refrigeration systems, used in quantum and superconducting applications

Key features


  • Wafer testing at cryogenic temperatures (< 2 K), allowing characterization of devices under the actual operating conditions of quantum chips and superconducting circuits.
  • Supports wafer-level characterization, enabling simultaneous evaluation of multiple devices on the same wafer, increasing R&D efficiency.
  • Optimized for quantum computing research, especially in testing superconducting qubits, resonators, and quantum circuits.
  • High-precision probe system, ensuring stable electrical contact in ultra-low temperature environments.
  • Advanced electrical – RF measurement capabilities, suitable for high-frequency measurements and quantum signals.
  • Integrated cryogenic platform design, reducing vibration and thermal noise, ensuring measurement accuracy.
  • Supports automated testing, enhancing throughput for quantum industry research and development.
  • Compatible with various types of wafers and measurement devices, flexible in experimental configuration.

Detailed description


  • Cryogenic Wafer Prober is a wafer testing system at cryogenic temperatures (below 2 K), designed for the research and development of quantum chips and superconducting devices. The system allows for the characterization of devices at the wafer level under the actual operating conditions of quantum circuits.
  • Designed for highly precise electrical and RF characterization, the system facilitates the evaluation of superconducting qubits, resonators, and advanced quantum architectures. By enabling wafer-level testing, it maximizes measurement throughput and shortens the device development timeline.
  • Leveraging a highly stable cryogenic platform, the system guarantees superior measurement precision while minimizing thermal noise. It seamlessly integrates with state-of-the-art measurement instruments, including VNAs, RF sources, and DAQ systems.


Detailed specifications


Specifications
Value

Wafer size

300 mm, 200 mm, and 150 mm

Travel

±160 mm XY, 0–40 mm Z, ± 4 ° Theta

XY accuracy

±20 µm

Travel speed

Up to 35 mm/s XY, automatically adjusted

Wafer base temperature

< 2 K 

Time required to change a wafer and start measuring the next wafer

~ 3 h

Number of signal channels

The system can support up to 768 independent DC signal lines

The system supports up to 48 RF / microwave signal lines

Load wafer

Wafers can be loaded into the system's load lock chamber from FOUP, cassette, or manually


Field of Study Materials Sciences or Semiconductor Technology or Quantum Technology
Brand Bluefors
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