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Semiconductor
Advanced Packaging & Testing
Ball-Wedge Bonder F&S Bondtec 5810

The automatic Ball-Wedge wire bonding machine 5810 F&S Bondtec features a flexible interchangeable bonding head along with an intelligent image recognition system. The device provides a repeatability accuracy of ±3 µm, operates fully automatically without operator dependence to optimize productivity. The product is an ideal solution for R&D applications, pilot manufacturing, and medium-scale production.

Secondary Ion Mass Spectrometry (SIMS)
IMS 7f‑Auto Secondary Ion Mass Spectrometer

Equipped with double focusing magnetic sector SIMS technology, the IMS 7f-Auto secondary ion mass spectrometer provides excellent depth resolution with a detection limit of ppb. This is a fully automated analytical solution that delivers high throughput for the semiconductor, optoelectronics, and materials industries, maximizing productivity with continuous operation 24/7.

Cryogenic Systems
Bluefors XLDsl Dilution Refrigerator Measurement Systems
The XLDsl Dilution Refrigerator Measurement System is a cryogenic dilution refrigerator designed for research and quantum computing applications, providing a stable cryogenic environment at milli-Kelvin levels to operate superconducting qubits, while integrating precise measurement capabilities for experiments and the development of quantum technology.
Cryogenic Systems
Bluefors SD Dilution Refrigerator Measurement Systems
The Bluefors SD Dilution Refrigerator Measurement System provides a stable cryogenic milli-Kelvin environment for quantum computing research, supporting superconducting qubits and quantum measurements with high accuracy.
Cryogenic Systems
Bluefors Ultra-Compact LD Dilution Refrigerator Measurement Systems
The Ultra-Compact LD helium dilution refrigerator system from Bluefors is a high-end integrated cryogenic solution, allowing for temperatures down to milli-Kelvin in a super compact design. The device combines a cryostat, measurement system, and control infrastructure in a synchronized platform, optimized for low-temperature physics research, quantum computing, and experiments requiring extremely high stability in confined spaces.
Cryogenic Systems
Bluefors LH Dilution Refrigerator Measurement Systems
Bluefors LH is a horizontal dilution refrigerator system, providing a stable milli-Kelvin temperature environment for cryogenic measurement applications and quantum research. The design supports operation at various angles, suitable for cryogenic detectors, beamlines, quantum optics, and ultra-low temperature experiments requiring high stability.
Cryogenic Systems
Bluefors XLDHe 1K High Power Measurement System
Bluefors XLDHehp is a high cooling power 1K cryogenic system, providing a stable low temperature environment for quantum applications and high-performance cryogenic measurements. The system supports large heat loads, high-density wiring, and low noise RF/DC measurements, suitable for spin qubits, cryogenic detectors, and ultra-low temperature research.
Cryogenic Systems
Bluefors XLDHesl 1K Measurement Systems
Bluefors XLDHesl is an integrated 1K side-loading cryogenic system that provides a stable low-temperature environment for quantum applications and high-performance cryogenic research. The side-loading design supports high-density wiring, flexible expansion, and quick replacement of measurement infrastructure for complex quantum experiments.
Cryogenic Systems
Bluefors LDHe 1K Measurement System
The 1K cryogenic measurement system using helium is designed for ultra-low temperature experiments in superconducting material research, quantum physics, and quantum devices. An optimal solution for modern R&D laboratories.
Cryogenic Systems
Bluefors SDHe 1K Measurement System
The 1K cryogenic measurement system using helium (SDHe), compact design for low temperature experiments in superconducting material research, quantum physics, and quantum technology. A flexible solution for modern R&D laboratories.
Cryogenic Systems
Bluefors Cryogenic Wafer Prober
Cryogenic wafer testing system for quantum chips, allowing characterization of quantum devices and superconducting circuits at ultra-low temperatures, supporting research and development of quantum computing technology in a wafer-level environment.
Advanced Packaging & Testing
Automatic Large Area Bonder Heavy-Wire F&S Bondtec 8650

The F&S Bondtec 8650 automatic wire bonding machine features flexible Wedge-Wedge bonding technology for large wires combined with an intelligent image recognition system (PRU). The machine achieves an X/Y travel of up to 700x480 mm with a large force range from 0-1800 cN and integrates CO2 snow cleaning. The device optimizes packaging speed, eliminates manual errors, and is ideal for R&D and the production of hybrid circuits, with average COB output.

Wire Bonding & Testing
Weld Bonding F&S Bondtec 90 series

The F&S Bondtec Series 90 is groundbreaking with the philosophy of "6 in 1", allowing for quick swapping between automatic wire soldering heads and pull/shear testing on the same platform. The machine features an ultra-wide working area of 480x700mm along with an intelligent PRS image recognition system, optimizing accuracy and processing speed. This solution helps businesses maximize equipment investment costs and flexibly change production models continuously without worrying about memory limitations. Series 90 is the ideal choice for applications in microchip packaging, power semiconductor components, and connecting electric vehicle battery cells.

Advanced Packaging & Testing
Heavy Wire Wedge Bonder F&S Bondtec 5350

F&S Bondtec 5350 is a Wedge-Wedge wire bonding machine for large wires 100–500 µm (Al) and 100–300 µm (Cu), supporting ribbons up to 250 µm. The machine uses a motorized Z/Y axis, Voice-Coil bonding force 0–1800 cN, automatic micrometer wire cutting, ultrasonic 58 kHz (optional 40–120 kHz), suitable for R&D, prototyping, and repair with high repeatability.

Advanced Packaging & Testing
Ball-Wedge Bonder F&S Bondtec 5610i

The F&S BONDTEC 5610i is a groundbreaking semi-automatic Gold Ball wire bonder fully controlled via PC, bridging the gap between manual and automatic equipment. The system delivers an ultra-high placement accuracy of ±5 µm @ 3 Sigma, an impressive speed of 2 to 3 seconds per wire, and the flexibility to swap bond heads within just 3 minutes. Featuring two versatile operating modes (Single Bond and Multi Wire), the equipment offers outstanding optimization for advanced microcircuit bonding and die repair tasks, while seamlessly converting into a pull/shear tester.

Advanced Packaging & Testing
Automatic Large Area Bond Tester F&S Bondtec 8600C
The F&S BONDTEC 8600C is a next-generation, PC-controlled automatic bond tester capable of performing fully automated pull and shear tests over a large area. The system supports versatile test heads, including 100 cN, 1,000 cN, and 5,000 cN Pullheads, as well as 500 cN and 5,000 cN Shearheads, catering to a wide range of force spans and bond quality inspection applications within the semiconductor, battery, and solar energy industries.
HR Ultra-Trace Analysis
X-ray Photoelectron Spectrocopy (XPS) SPECS EnviroMETROS

SPECS EnviroMETROS is the next generation of XPS surface measurement systems (Surface Hybrid Metrology) that is revolutionary, designed specifically for analyzing the chemical composition in depth of thin films from laboratory scale to semiconductor manufacturing. The system integrates core technology of angle-resolved X-ray photoelectron spectroscopy (ARXPS) that is fully automated, combining flexible multi-source X-ray energy and the ability to operate in a very wide pressure range from ultra-high vacuum (UHV) to near-atmospheric pressure (NAP). This is the optimal solution for analyzing layer structure and material properties without destroying the sample.

Maskless and Direct-Write Lithography
NanoFrazor Nanolithography Tool
The NanoFrazor is based on Thermal Scanning Probe Lithography (t-SPL), delivering direct, maskless nanopatterning with sub-nanometer precision. Its modular and highly configurable platform combines in-situ imaging, closed-loop lithography, and upgradeable hardware and software options to create complex nanoscale and grayscale structures for cutting-edge research and innovation.

Lithography
Spin Coater/Developer System N.unixx - Notion System
Coating system n.unixx-series owns exclusive Cover Chuck technology that eliminates the cotton candy effect. The machine meets a maximum Spin Speed of 10,000 rpm, providing an ideal uniform coating and maximizing the savings of Resist. The device is a perfect semi- automatic solution that optimizes Recipe Development for wafer lithography applications up to 300 mm in laboratory and small batch production.
Lithography
Wafer bonder N.unixx - Notion system

The n.unixx-series Wafer bonding device applies breakthrough Thermal-Pressure Bonding technology. The system features a sophisticated mechanical pressure generator and a heating temperature range of up to 200°C with uniformity of ±0.5°C, providing a perfect film bonding connection. The device is an ideal solution to optimize the single wafer bonding process for MEMS applications, micro-electromechanical systems, and advanced semiconductor packaging.

Lithography
Wafer debonder N.unixx - Notion system

The n.unixx-series wafer separation system uses advanced Thermal Slide Separation technology with adjustable separation force. The system integrates independent heating plates for the wafer and carrier, reaching temperatures up to 200°C along with a protective vacuum line. The device is an ideal solution for safely handling sensitive ultra-thin wafers in 3D-IC packaging, stacked semiconductor chips, and MEMS.

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