The ACCµRA100 uses semi-automatic robotic axis technology, achieving superior post-weld accuracy of ± 0.5 µm and a large pressing force of 1-1000 N. The device provides high repeatability, optimal cost, and is an ideal solution for research (R&D) and diverse applications such as Flip-Chip, Die attach, MEMS, 3D Packaging.

EIS-200ERP (Elionix Ion Beam Etching/Sputtering System): This is an ion beam etching/sputtering system capable of nano-level material etching and deposition utilizing an ECR (Electron Cyclotron Resonance) ion beam.

The PlasmaPro series from Oxford Instruments provides flexible plasma processing platforms from R&D to high-volume production, including RIE, ICP, ICP CVD, PECVD, and combined RIE/PE technologies. It supports wafers from small pieces to 300mm, controls film stress with dual frequency (LF/HF), and detects endpoint using OES/laser. An optimal solution for MEMS, sensors, optics, LEDs, power microelectronics, and failure analysis.

MICADAS is the leading AMS ¹⁴C system from Ionplus AG, providing superior accuracy, energy efficiency, and a compact design for advanced radiocarbon dating applications.

The AttoMap-310 provides trace element mapping capabilities with an exceptional sensitivity that is 1000 times higher than SEM-EDS. Sigray's proprietary X-ray source technology enables a spatial resolution down to <3-5µm and speeds up to 5ms/point, delivering a breakthrough solution for semiconductor research, mineralogy, and materials science.

Danh mục sản phẩm của SPECS đã được mở rộng với dòng hệ thống quang phổ XPS ProvenX, đại diện cho đỉnh cao từ nền tảng kiến thức rộng lớn của chúng tôi trong việc phát triển và sản xuất các hệ thống phân tích toàn diện nhằm đáp ứng những yêu cầu khoa học khắt khe nhất. ProvenX bao gồm một loạt các hệ thống XPS chuyên dụng cho ARPES, µ-ARPES, Kính hiển vi động lượng (Momentum Microscopy), XPS/UPS cũng như NAP-XPS.

As the world's first dedicated horizontal electron diffraction machine, the ELDICO ED-1 combines a 160 keV beam source and a DECTRIS QUADRO detector. The device achieves a resolution of <0.84 Å, enabling rapid decoding of nano crystal structures (10–1000 nm). This is the optimal cost-effective solution for pharmaceutical research, battery materials, and agricultural chemicals.

SPECS' EnviroESCA is an electron spectroscopy system for chemical analysis in real-world environmental conditions thanks to breakthrough (N)AP-XPS technology. The device operates at pressures of up to hundreds of mbar, integrating a micro-focused AlKalpha monochromatic X-ray source and Environmental Charge Compensation to automatically neutralize background charging. EnviroESCA minimizes the time from loading to measuring samples, ideal for research on biological materials, polymers, batteries, catalysts, and liquids.

SPECS FE-LEEM/PEEM P90 Series is a next-generation surface electron microscope system, combining a breakthrough between LEEM and PEEM techniques in a minimalist, ultra-stable modular design. Equipped with a Cold Field Emission Gun and an integrated energy filter, the system provides micro-spectral analysis capabilities and displays thin film structure images with superior spatial resolution below 2nm. This is the optimal analytical solution for in situ surface kinetics studies in situ, advanced materials science, and nanotechnology

The Apex XCT-150 is an X-ray microscope that delivers incredible results by providing sub-micron resolution 3D imaging in just minutes. It is an advanced tool for failure analysis and packaging in the semiconductor industry. The system features a spatial resolution of 0.5 microns anywhere on samples up to 300 mm in diameter. With the Apex XCT, failure analysis workflows can be streamlined by imaging entire intact packages, wafers, and PCBs, minimizing time-consuming and destructive sample preparation.