Quang khắc chùm ion Elionix ELS EIS-200ERP

TFE Filament

ZrO/W Thermal field emitter

Acceleration Voltage

50 kV

100 kV

125 kV

150 kV

Beam Current

1 nA ~ 800 nA

20 pA ~ 200 nA

5 pA ~ 100 nA

5 pA ~ 100 nA

Minimum Beam Diameter

Ø 2.8 nm

Ø 1.8 nm

Ø 1.7 nm

Ø 1.5 nm

Standard Field Size

1000 μm□

1000 μm□

500 μm□

500 μm□

Min./Max. Field Size

Min. 100 μm □

Max. (Option) 3000 μm□

Scan Clock

100 MHz

Max. (Option) 200 MHz

Shot Pitch

Min. 0.2 nm

Max. Sample Size

8” Wafer / 12” Wafer

Max. Exposure Area

200 mm x 200 mm / 300 mm x 300 mm

Loading Mechanism

Single AutoLoader

Multi AutoLoader

Robot Loader

Software

elms

• Beam adjustment function

• Drawing schedule function

• Pattern data conversion function

• Account management

• Python scripting