Key features
- Comprehensive multilayer measurement: Determines thickness (2-500nm) and spectral properties (n&k) for all layers of organic coating materials and ITO with impressive repeatability (3σ < 0.2nm).
- Proprietary RT optical method: Ensures absolute accuracy by simultaneously collecting and analyzing reflectance and transmittance spectra.
- Stable operation in real environments: The special R-head and T-head design helps eliminate errors due to changes in height (± 1.5mm) and tilt (± 0.4°) of the sample.
- Safe non-contact design: Direct measurements are performed through the glass window of the production line, completely non-destructive and does not interrupt the production cycle.
- High-speed analysis: Collects ultra-fast thickness data (≤ 1.0 seconds/point), supports expansion with a fiber optic multiplexing system from 1 to 9 flexible measurement positions.
- Maximum process automation: Integrated I/O for auto-triggering and internal calibration, supporting monitoring and recording of 100% continuous production data.
Detailed description
Optimal RT optical technology for OLED production
Unlike conventional applications, the production of organic light-emitting diodes (OLED) requires strict accuracy with no tolerance for "type B" items. Xelas INLINE-oled thoroughly addresses this issue with its proprietary RT (reflectance and transmittance) optical measurement technology. By analyzing the phenomenon of light interference and the change in wave amplitude as it passes through thin film layers, combined with intelligent oscillation model algorithms, the device quickly and accurately determines the thickness and refractive index, absorption n&k even when considering the surface roughness.
Overcoming real inline measurement barriers
Variations in height and tilt of the substrate when moving at high speed on the production line are often a major barrier causing errors for measurement devices. The optical probe of Xelas INLINE-oled is specially crafted to maintain absolute stability of the measured spectral values before sample position tolerances of up to ± 1.5mm and tilt ± 0.4°. Additionally, data collection occurs continuously, safely, and completely non-destructively thanks to a structure that allows measurements through the glass window of the production chamber, helping to protect the absolute vacuum environment.
Integrated system and robust quality control
With a multiplexer supporting expansion from 1 to 9 independent measurement channels, Xelas INLINE-oled easily meets all multi-point monitoring requirements for both current and future production line configurations. The real-time data reporting system provides immediate feedback on thickness deviations or changes in material properties. As a result, OLED display and lighting manufacturers can easily optimize yield and stabilize processes most effectively.