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X-ray Photoelectron Spectrocopy (XPS) SPECS EnviroESCA

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Thin Film Deposition System PRO Line PVD 200
Thin Film Deposition System PRO Line PVD 200
Secondary ion mass spectrometry 1300-HR³
Secondary ion mass spectrometry 1300-HR³

X-ray Photoelectron Spectrocopy (XPS) SPECS EnviroESCA

SPECS' EnviroESCA is an electron spectroscopy system for chemical analysis in real-world environmental conditions thanks to breakthrough (N)AP-XPS technology. The device operates at pressures of up to hundreds of mbar, integrating a micro-focused AlKalpha monochromatic X-ray source and Environmental Charge Compensation to automatically neutralize background charging. EnviroESCA minimizes the time from loading to measuring samples, ideal for research on biological materials, polymers, batteries, catalysts, and liquids.

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  • Field of Study
  • Brand - SPECS
SPECS
SPECS

The group manufactures ultra-high vacuum measurement devices, renowned for its environmental vacuum XPS equipment

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Key Features


  • Revolutionary Technology: Overcoming the ultra-high vacuum (UHV) barrier of traditional XPS systems, allowing for chemical surface analysis at high pressures far above UHV (up to hundreds of mbar).
  • High Throughput Analysis: Providing the shortest loading-to-measurement time for all types of samples, supporting continuous automated operation with the AutoLoader robot.
  • Controllable Atmosphere: Maintaining and adjusting a stable atmosphere from sample loading through the entire analysis process via dedicated sample environment modules.
  • Environmental Charge Compensation: Using low-energy ions and electrons generated from the gas molecule ionization process by X-rays to automatically neutralize charge, enabling accurate analysis of insulating samples without the need for auxiliary equipment.
  • Ergonomic All-in-one Design (Optimized all-in-one design): Integrating the entire power supply system, controller, electrical cabinet, and closed-cycle water cooling system in a single compact installation footprint.
  • Fully Software Controlled (Fully software controlled): Fully automating the vacuum system, gas supply, and analytical components, continuously logging system parameters (data logging) and supporting remote operation.

Detailed description


  • Technology/Principle: EnviroESCA operates based on the principle of the photoelectric effect. The device uses a monochromatic AlKalpha micro-focused X-ray source to excite electrons from the sample surface, which are then collected by a hemispherical analyzer combined with a differentially pumped lens system to determine the chemical composition. Thanks to the advanced gas and vacuum management system, the device can operate stably in the near ambient pressure (NAP) range.
  • Highlights: Traditional ESCA/XPS systems must operate in ultra-high vacuum (UHV) environments, making the analysis of vacuum-incompatible samples such as liquids, polymers, biological samples, or in operando reactions of batteries and catalysts impossible. EnviroESCA completely addresses this issue by allowing direct measurement in pressure and humidity environments, entirely eliminating the need for complex sample pretreatment.
  • Integration/Expansion: The system features a smart modular design with the SampleExplorer ex situ sample preparation device. Users can integrate additional advanced options such as: a scannable small spot ion source or a gas cluster ion source for sputter depth profiling; the SmartDock sample loading chamber connecting to the GloveBox system; and the HPC 20 high-pressure reaction chamber.

Detailed specifications


Specifications

System configuration values

Electron Spectrometer (Electron analyzer)

Hemispherical electron analyzer (average radius 150 mm) with a differentially pumped lens system

Electron Detector (Electron probe)

Delayline detector supporting up to 400 channels

X-ray Source (X-ray source)

Al Kα micro-focused monochromator, 600 mm Rowland circle diameter

X-ray Spot Size (X-ray spot size)

Tunable from 200 µm to 1 mm, optimized for the analysis region

Charge Neutralization (Charge neutralization)

Environmental Charge Compensation (Automatic environmental charge compensation)

Pressure Range (Operating pressure range)

Up to 100 mbar with an aperture size of 300 µm (other aperture sizes available upon request)

Gas Dosing System (Gas supply system)

2 independent gas dosing units at the analysis position combined with mass flow controllers

Sample Size Compatibility (Maximum sample size )

Diameter up to 120 mm and height up to 40 mm

Sample Stage (Sample stage)

Fully mechanized sample stage High precision 3-axis stage (3-axis high precision)

System Dimensions (Dimensions & Weight)

Width 2100 mm x Depth 1700 mm x Height 2700 mm. Weight: 1800 kg


Field of Study Materials Sciences or Life Sciences or Quantum Technology or Solar & Lithium Batteries
Brand SPECS
X-ray Photoelectron Spectrocopy (XPS) SPECS EnviroESCA
X-ray Photoelectron Spectrocopy (XPS) SPECS EnviroESCA
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