Key features
- Flexible measurement configuration: Optional wavelength ranges with Si (380-1050 nm) or InGaAs (850-1700 nm) sensors, maximizing the requirements for testing transparent films (in the visible spectrum) and light-absorbing films (near-infrared).
- Extremely high accuracy and repeatability: Achieves a thickness error of only ± 0.01 µm and superior repeatability (3σ < 0.001 µm for the range of 0.1-1 µm), ensuring precise quality control for ultra-thin coatings.
- Streamlined hardware design: Integrates a Halogen HL50 light source (lifetime >2000 hours) and Y-fiber optical cable in a compact assembly, optimizing laboratory workspace.
- Diverse film structure analysis: Addresses single-layer or dual-layer coating measurement challenges, ideal for anti-reflective (AR) films, photo-resist materials, or paint/automotive coatings.
- User-friendly software operation: The powerful ETA-STC platform automates the process of data collection, spectral processing, and thickness calculation, allowing technicians to easily evaluate even without deep expertise in spectroscopy.
Detailed description
Advanced linear reflectance spectroscopy technology
Developed and manufactured to strict standards in Germany by NXT GmbH, the ETA-SST system operates on a breakthrough spectral reflectance measurement platform. The device uses a multi-colored Halogen light source transmitted through a Y-shaped optical fiber to illuminate the sample surface. The reflected signal is captured through a three-dimensional holographic diffraction grating to a high-performance linear array sensor (512-pixel Si or 256-pixel InGaAs). This stable optical system provides a theoretical resolution of 0.8 nm with ultra-fast scanning times (as low as 0.01 ms), completely eliminating disturbances from ambient light.
Troubleshooting solution for thin film QA/QC
In the optical and semiconductor thin film industry, small variations in coating thickness can lead to complete product failure and material waste. The ETA-SST addresses this bottleneck with ultra-fast non-destructive measurement technology. Reflectance spectral data is instantly analyzed to accurately control thickness from 0.1 µm to 30 µm. The diverse measurement capabilities – from anti-reflective coatings on glass, bare glass, to packaging polymers and optical barrier materials – enable manufacturers to closely monitor, adjust deviations, reduce scrap, and optimize R&D efficiency.
Easy integration and smart platform
Perfectly shaped for laboratory applications, the ETA-SST features a compact machine frame (size ~ 47 x 31 cm). The heart of the system is the user-friendly ETA-STC analysis software, which supports the export and display of data in intuitive spectral graph formats. This platform allows for easy expansion of curve fit methods, enabling the measurement of ultra-thin film systems (down to 20 nm) when combined with the company's advanced stack measurement technologies, ensuring a safe and flexible long-term investment.