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Nanoindentation Tester ENT-5

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Scanning electron microscope - Focused Ion Beam DB550
Scanning electron microscope - Focused Ion Beam DB550
Glove Box PureMod
Glove Box PureMod

Nanoindentation Tester ENT-5

The nano hardness measurement system provides high data reproducibility by minimizing environmental noise effects during measurement. Test load: 0.5 µN ~ 2 N. Simple operation and high data reproducibility. 


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  • Field of Study
  • Brand - Elionix
  • Sample materials
Elionix
Elionix

A renowned manufacturer of electron beam lithography systems (E-beam Lithography) for R&D from Japan

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Main features


Viscoelasticity test:
  • Integrates the ability to create oscillating loads at optional frequencies, combining continuous indentation into the sample under a constant background force.
  • Supports accurate measurement of the kinetic properties of materials including:

    • Storage modulus
    • Loss modulus
    • Loss factor
  • Ability to combine with heating stage
In-liquid test:
  • Supports the execution of nanoindentation measurements (hardness and elasticity) directly while the sample is submerged in water or other specialized liquids.
Micro-particle compressive strength test:
  • Note: Only applicable for the integrated High load unit configuration.
  • Uses a flat-ended indenter to apply compressive force or crush fine particles.
  • Accurately determines and measures the compressive strength as well as the deformation behavior of the particles under load.

Detailed description


Ability to apply on a variety of material types

  • Types of thin film materials such as coatings and hard films.
  • Resin plastic materials, film materials.
  • Ultra-thin film like carbon similar to diamond (DLC - Diamond-Like Carbon).
  • Functional resin film and surface modification film.
  • Microparticles and powder materials.

Nanoindentation test

  • Accurately determine mechanical properties such as hardness and elastic modulus of thin films, extreme surfaces, and micro-sized regions.
  • No indentation observation is required due to the ability to directly analyze the load-displacement curve to obtain material properties..
  • Strictly comply with international standards ISO 14577-1 / JIS Z 2255.
Data reproducibility and maintainability
  • Temperature control mechanism

    • Eliminate the thermal expansion phenomenon of the sample and testing equipment.
    • Control the internal temperature of the wind tunnel chamber at a stable ±0.1°C.
    • Use materials with a low thermal expansion coefficient (Nobinite) for measuring components.
    • Completely prevent the influence of external air currents.
  • High precision positioning stage

    • Applying high-precision template technology developed in-house from the company's electron beam lithography (EBL) equipment.
    • Movement positioning capability with 0.1 µm fine-tuning steps.
    • Measure at any desired location with an observation magnification of up to 2,000x (when using a standard 20x objective lens combined with digital zoom).
  • Anti-vibration mechanism

    • High-precision wedge-shaped stage design with superior vibration resistance.
    • Equipped with a standard active anti-vibration table.
  • Software (Control Software)

    • Integrate auxiliary functions such as: indenter tip correction, temperature drift correction, and reminders for daily periodic inspection.
    • The interface and operating procedures have been optimized through many years of practical experience.
  • Data reproducibility

    • Enhance the repeatability of data through mechanisms that eliminate environmental noise effects (such as vibrations and temperature variations).
    • Ensure stable data collection capability even in continuous measurement mode.
  • Maintainability

    • Easily replaceable flexibly between the high load unit and the low load unit.
    • Minimize equipment downtime through the calibration process carried out by swapping these modules.

Load Unit

  • High load unit:

    • Support for the test force range from 5 µN to 2 N.
    • Compatible with hardness measurement tests for a wide range of materials, from metals to polymers.
    • (For example, typical measurement: Measurement on Fused quartz with a test load of 100 µN, performed 9 repeated presses).
  • Low load unit:

    • Supports a very small force range from 0.5 µN to 10 mN.
    • Provides superior repeatability and stability for measurements on soft materials (elastic modulus $\le$ a few GPa) and measurements with a depth of indentation below 10 nm.
    • Optimally suitable for evaluating the mechanical properties of functional plastics (such as UV-cured plastics), low-k films, elastic materials (such as silicone rubber), and ultra-thin hard films (such as DLC films).

Detailed specifications


Parameter Value
Range load / Load resolution * High load unit  5 μN to 2,000 mN / 5 nN
* Low force unit: 0.5 μN to 10 mN / 0.03 nN
Force application method Electromagnetic force
Measurement range +/- 50 μm
Measurement resolution 0.3 pm
Measurement method Optical
Sample size Diameter 50 mm, thickness 3.5 mm
Feasible measurement area X 50, Y 40 mm
Minimum displacement step 0.1 μm


Field of Study Materials Sciences or Semiconductor Technology
Sample materials Metals & Alloys or Advanced Materials
Brand Elionix
Nanoindentation Tester ENT-5
Nanoindentation Tester ENT-5
0 ₫