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Inline multi-purpose spectrometer ETA-TCM

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Inline multi-purpose spectrometer ETA-TCM

The inline spectrometer system ETA-TCM from NXT provides a 100% non-destructive thin film quality control solution directly on the production line. The device supports simultaneous measurement of thickness (0.1–30 µm), color, transmittance, reflectance, and optical density (OD1–OD7). This is the optimal solution to save materials and enhance productivity for the screen, glass, and semiconductor industries.

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  • Field of Study
  • Brand - NXT GmbH
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NXT GmbH
NXT GmbH

Manufacturer of Reflective Technology Coating Thickness Spectroscopy

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Key featuresDetailed description

Key features

  • Modular inline design: Easy to install into any existing production system and minimizes integration costs.
  • Simultaneous multi-parameter measurement capability: Provides instant data on thickness, color, reflectance, transmittance, and optical density in a single system.
  • Measurement with high accuracy and repeatability: Ensures stable measurement data thanks to high linearity Si/InGaAs sensor and international standard calibration process.
  • High durability in dynamic environments: Maintains high measurement stability even when the sample shifts, shakes, or changes distance or tilt angle.
  • Automatic dark current and reference measurement: Integrates smart mechanical shutters to eliminate system errors without stopping the production line.
  • Dedicated ETA-TCM software: Visualizes real-time trend data, smart storage, and direct connection to PLC via industrial communication ports.

Detailed description

Real-time non-contact measurement principle

ETA-TCM is an industrial spectral measurement system based on the principle of non-contact reflection and transmission measurement. The device uses a transmission diffraction grating combined with a high linearity diode/InGaAs probe. Each system is precisely calibrated with a standard light source, ensuring long-term stable measurement results in both static and dynamic production environments.

Comprehensive quality control and waste reduction

Thanks to extremely fast inline measurement speed, ETA-TCM controls 100% of the surface quality of thin film products. The device instantly detects thickness deviations (20 nm – 30 µm) or optical density (OD1–OD7). This allows operators to timely adjust the coating process, helping to optimize material usage and prevent mass errors.

Modular design and intelligent software

The device features compact probes connected by stainless steel armored fiber optics. The ETA-TCM software provides intuitive trend charts and sets pass/fail limits. The system supports direct measurement data transmission to the PLC of the production line via Digital I/O, TCP/IP, or RS232 ports, meeting factory automation requirements.

Detailed specificationsAdditional parameters

Detailed specifications

Thickness measurement range (Reflection & Thickness Configuration)0.1 – 20 µm (380–1050 nm) or 1 – 30 µm (850–1700 nm)
(Supports measurements down to 20 nm when using the Stack fit method)
Thickness accuracy± 0.01 µm (for range 0.1–1 µm); ± 0.04 µm (for range 1–20 µm); ± 0.1 µm (for range 1–30 µm)
Thickness repeatability3σ < 0.001 µm (range 0.1–1 µm); 3σ < 0.005 µm (range 1–20 µm); 3σ < 0.005 µm (range 1–30 µm)
Color spectrum range & optical transmission380 – 780 nm or 380 – 1050 nm
Color accuracy (xyY)x,y: ± 0.002; Y: ± 0.5
Color repeatability (xyY)x,y: 3σ < 0.001; Y: 3σ < 0.1
Optical density measurement range (OD)OD1 – OD7
OD measurement accuracy± 0.5% relative (for OD ≤ 6.0); ± 1.0% relative (for 6.0 < OD ≤ 7)
OD measurement repeatability3σ < 0.02 (3.0 < OD ≤ 5.0); 3σ < 0.04 (5.0 < OD ≤ 6.0);
3σ < 0.08 (6.0 < OD ≤ 6.5); 3σ < 0.12 (6.5 < OD < 7)
Type of probe (Detector)Si line sensor 512 pixel; InGaAs line sensor 256 pixel;
Or Si photo element 24-bit digitized (for OD configuration)


Additional parameters

  • Power supply: 3 phase, 380–400 V, 50/60 Hz.
  • Power consumption: ~12 kW (including cooling and control system).
  • Noise level: <60 dB under standard operating conditions. 
Field of Study Materials Sciences
Brand NXT GmbH
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Inline multi-purpose spectrometer ETA-TCM
Inline multi-purpose spectrometer ETA-TCM
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