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Solar & Lithium Batteries
Flip-chip Bonding
Flip-Chip Bonder SET ACCµRA100

The ACCµRA100 uses semi-automatic robotic axis technology, achieving superior post-weld accuracy of ± 0.5 µm and a large pressing force of 1-1000 N. The device provides high repeatability, optimal cost, and is an ideal solution for research (R&D) and diverse applications such as Flip-Chip, Die attach, MEMS, 3D Packaging.

Advanced Packaging & Testing
Ball-Wedge Bonder F&S Bondtec 5810

The automatic Ball-Wedge wire bonding machine 5810 F&S Bondtec features a flexible interchangeable bonding head along with an intelligent image recognition system. The device provides a repeatability accuracy of ±3 µm, operates fully automatically without operator dependence to optimize productivity. The product is an ideal solution for R&D applications, pilot manufacturing, and medium-scale production.

Physical Vapor Deposition (PVD)
Thin Film Deposition System AXXIS
AXXIS is a versatile PVD thin film deposition system designed for research and development (R&D) activities that require various coating techniques on the same equipment. The system allows for the combination of Magnetron sputtering, thermal evaporation, and electron beam evaporation while supporting co-deposition to create multi-component films or complex alloys.
Physical Vapor Deposition (PVD)
Thin Film Deposition System PRO Line PVD 200

The PRO Line PVD 200 system elevates research productivity with its capability to process large wafers up to 8 inches. The system serves as a perfect solution to shorten your experimental turnaround time, delivering absolutely uniform thin-film deposition for future industrial applications.

Fundamental Research Equipment
Glove Box Jacomex G(Box)
The G(BOX) Series glove box system is part of the modular equipment segment for pressure and humidity control (Modular Glove Box under Regulated Atmosphere) from Jacomex, designed specifically for scientific and industrial applications. The device features a flexible structure, easy to configure and upgrade, providing optimal product protection solutions in environments with controlled humidity or reduced oxygen atmosphere to prevent explosions.
Advanced Packaging & Testing
Automatic Large Area Bond Tester F&S Bondtec 8600C
The F&S BONDTEC 8600C is a next-generation, PC-controlled automatic bond tester capable of performing fully automated pull and shear tests over a large area. The system supports versatile test heads, including 100 cN, 1,000 cN, and 5,000 cN Pullheads, as well as 500 cN and 5,000 cN Shearheads, catering to a wide range of force spans and bond quality inspection applications within the semiconductor, battery, and solar energy industries.
Physical Vapor Deposition (PVD)
Physical Vapor Deposition Batch In-Line KDF

KDF In-Line PVD Solutions (part of the Kurt J. Lesker group) is a line of advanced batch in-line thin film sputtering equipment, boasting superior mechanical reliability and the lowest cost of ownership (CoO) in the industry. Unlike bulky cluster tools, the continuous lane structure of KDF optimizes space, simplifies operation and maintenance processes, while providing a leap in coating uniformity, output yield, and process stability. The system is designed flexibly, perfectly meeting the needs from research and development (R&D) scale to large-scale industrial production in the fields of semiconductors, new materials, medical devices, and flat panel displays.

Flip-chip Bonding
Flip-Chip Bonder FC300 SET SAS

The FC300 integrates absolute parallel alignment technology within a range of 1 µrad, achieving high post-weld accuracy of ± 0.3 µm and an extremely wide force range of 1-4000 N. The device provides superior repeatability and flexible configuration capabilities from R&D to pilot production lines. The system is designed for advanced applications in ultra-fine structure component packaging (< 10 µm), 3D Integration, X-Ray/Infrared imaging sensors, MicroLEDs display, and Silicon Photonics.

Flip-chip Bonding
Flip-Chip Bonder ACCµRA OPTO SET SAS

ACCµRA OPTO possesses robotic axis technology combined with an extremely low force range of 0.2 - 10 N. The device achieves post-weld accuracy of ± 0.5 µm, providing high process repeatability and excellent flexibility. This is the optimal solution for specialized applications such as Optoelectronics and Silicon Photonics. 

Flip-chip Bonding
Manual Flip Chip Bonder ACCµRA M SET SAS

ACCµRA M uses manual operation technology combined with a high-precision mechanical support system, achieving a post-soldering accuracy of ± 3 µm and a maximum compression force range of 100 N. The device provides absolute flexibility, operates intuitively and easily with the most optimal investment cost, making it an ideal solution for educational purposes, initial process testing, and basic R&D applications.

In-situ Alignment Bonding
Aligner Wafer Bonder AWB-08 AML

The AWB 08 wafer welding and alignment machine is specialized for sizes 6" and 8". The device integrates a 1 µm precision alignment and welding process in a vacuum chamber, with a compression force of up to 40 kN. This is the ideal solution for advanced MEMS applications, 3D packaging, and high-performance experimental production at industrial standard laboratory scale.

Atomic Layer Deposition (ALD)
Atomic Layer Deposition TSF200
The Beneq TFS 200 is the most popular atomic layer deposition (ALD) device in academic research and corporate R&D. With its diverse configuration and flexible upgrade capabilities, the system meets all specialized needs of the laboratory. The device supports many advanced applications from protective barrier films, semiconductors, solar cells to superconducting components.
Atomic Layer Deposition (ALD)
Versatile ALD platform Beneq Transform®

Beneq Transform® is a high-end industrial standard ALD system for mass production in the "More-than-Moore" era. The machine integrates both Thermal ALD and PEALD, flexibly processing semiconductor wafers from 3" to 8" (with a roadmap up to 12"). This is the core thin film solution for Power Electronics (GaN, SiC), RF, MEMS, sensors, MicroLED, and Photonics.

Wafer Inspection & Metrology
Inline Inspection System VEreveal® PVA TePla

VEreveal® uniquely combines optical spectroscopy and hyperspectral imaging technology for non-destructive surface inspection. The device allows for comprehensive assessment of material properties, coating thickness, and detection of defects and contamination on wafers up to 300mm with high accuracy and speed, suitable for production quality control.

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