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Synthesis & Fabrication
Ion Beam Etching/Sputtering System Elionix 200ERP
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Plasma Enhanced Chemical Vapour Deposition Model PlasmaPro 80/100/800
Synthesis & Fabrication
Electron Beam Lithography System ELS-ORCA
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Thin Film Deposition System NANO 36
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Physical Vapor Deposition (PVD)
Thin Film Deposition System PRO Line PVD 75
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Physical Vapor Deposition Batch In-Line KDF
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Atomic Layer Deposition System ALD-150LX
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