Key Features
- High Lateral Resolution: Achieves a practical resolution down to 4.2nm for the standard configuration and approaches the physical limit below 1.6nm when upgrading the aberration corrector.
- Integrated Imaging Energy Filter: Uses a 90-degree magnetic field deflection prism that acts as a beam splitter and energy filter, achieving sharp spectral resolution below 250meV without affecting spatial resolution.
- Cold Field Emission Gun: Provides a high-brightness electron source with extremely narrow energy dispersion (< 300meV), enabling sharp image display and capturing high-quality LEED diffraction patterns.
- Robust Piezo-Controlled Sample Stage (5-Axis Rigid Sample Holder): A new generation piezo motor-driven sample displacement system fully controlled by computer, supporting 5 degrees of freedom with superior positional repeatability under 500nm.
- Integrated Sample Heater (Integrated Sample Heating Unit): Smart sample holder design supports electron bombardment mechanism, allowing direct heating and direct observation (live observation) of kinetic processes at temperatures up to 1500K.
- Vibration-Free Multi-Chamber Concept (Vibration-Damping Multi-Chamber Design): All mechanical and optical components are installed in a stacking structure on a high-stiffness stainless steel frame, perfectly isolating vibrations from the external environment.
Detailed Description
Technology/Principle: The SPECS FE-LEEM/PEEM P90 system operates based on the principle of projecting a low-energy parallel electron beam perpendicular to the sample surface. The elastically reflected or secondary emitted electrons are guided back through the same electron optical system, passing through a 90-degree magnetic beam splitter and directly converging on a two-dimensional (2D) detector. The system flexibly supports various contrast modes such as reflectivity, phase contrast (Phase Contrast - MEM) that does not damage the sample, microdiffraction down to a size range of 200nm, along with ARPES and EELS spatial resolution spectroscopy techniques.
Highlights: In standard electron microscopy, the actual resolution is often severely limited by the phenomenon of spherical aberration, chromatic aberration of the objective lens, and stray field magnetic noise from the environment. The FE-LEEM P90 completely addresses this issue with a self-shielded lens design combined with the principle of precision mechanical stacking assembly. Notably, the FE-LEEM P90 AC version integrates a multi-element electron mirror that completely eliminates chromatic and spherical aberrations, increases transmission by 8 times, and improves resolution by 2 times compared to uncalibrated devices.
Integration/expansion: Thanks to the use of the standardized sample holder design SPECS SH2/12, the FE-LEEM P90 system easily connects without limits to other complementary surface analysis techniques. Users can further upgrade with the Aarhus 150 HT scanning tunneling microscope chamber (operating with thermal radiation up to 1000oC, a dedicated sample preparation chamber integrated with an IQE 12/38 ion source, a multi-pocket electron beam evaporator EBE-4, or an MPS-ECR plasma source. The entire assembly can be synchronously connected via the SPECS LTS (Linear Transfer System) vacuum linear transport system to automatically transfer samples between satellite chambers without losing ultra-high vacuum conditions.